Shaft motor precision stage

 

Features

  • High precision
  • Low vibration linear shaft motor is used
  • Open frame structure
  • XY travel ± 75 mm stroke
  • Positioning resolution: 0.1 μm
  • High speed control (maximum speed: 200 mm/s)
  • Excellent quietness
  • Highly accurate bonding when tiling
  • Small controller driver FMAX-4X-2SD available