High precision control alignment stage using four shaft motors. X and Y-axis linear motions and θ motions are available.
It consists of shaft motors with a diameter of 25 mm (S250DS model). By using a high-resolution linear scale of 0.001μm (1nm) for each axis, a repeatability of 0.1um or less is achieved. (X-axis: ± 0.078 μm, Y-axis: ± 0.049 μm)
It is controlled by combining a standalone control board using NPM's PCL6045BL (LSI) and a Panasonic driver.
Features
- High speed drive (tact-up)
- Positioning operation with high precision (Full-closed control)
- Overwhelming speed stability
- Quick settling (High response)
- Easy replacement of ball-screw mechanism due to the similarity in shape
- Multiple forcers can be driven on a single shaft
- Synchronous parallel drives with a single driver
- Excellent durability due to the non-contact structure (reduction of maintenance cost)
- Low dust generation
- Useable in adverse environments such as water, oil, contamination and dust
- Quiet